Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


한국표면공학회지 (28권6호 343-351)

A Study on the Wear Resistance Behaviors of TiN Films on Tool Steels by Cathode Arc Ion Plating Method

음극아크 이온 플레이팅법에 의한 공구강상의 TiN 피막의 내마모 특성에 관한 연구


신도리코(주) 기술연구소;경희대학교 기계공학과, 재료과학 기술연구소;
신도리코(주) 기술연구소;경희대학교 기계공학과, 재료과학 기술연구소;


Titanium nitride films have been prepared on various substrates (silicon wafer, HSS) by cathode arc ion plating process to measure microhardness, adhesion and wear-resistant behaviors by changing the substrate bias voltages (0∼-300V), thickness and roughness. Microhardnesses were measured by micro vickers hardness tester, the adhesion strengths were evaluated by acoustic signals through the scratch test with incremental applied load. As the substrate bias voltages were increased, the {111} orientation was predominant, the microhardnesses and adhesion strengths of tool steel were observed to be stronger than those of without subatrate bias voltage. Adhesion strengths of the substrate bias were 4-7 times higher than those of without the substrate bias, confirmed by SEM with EDX. Wear resistances were used pin-on-disk tribotester and TiN costing reduced the abrasive wear. As the substrate bias was increased, the weight loss and the friction coefficient was decreased.