Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


한국표면공학회지 (54권1호 25-29)

Study on the narrowed nanopores of anodized aluminum oxide template by thin-film deposition using e-beam evaporation

전자빔 증발법 박막 증착을 이용한 양극 산화 알루미늄 템플릿의 나노 포어 가공 연구

Lee, Seung-Hun;Lee, Minyoung;Kim, Chunjoong;Kim, Kwanoh;Yoon, Jae Sung;Yoo, Yeong-Eun;Kim, Jeong Hwan;

한국기계연구원 나노공정장비연구실;충남대학교 신소재공학과;한밭대학교 신소재공학과;
Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials;Department of Materials Science and Engineering, Chungnam National University;Department of Advanced Materials Engineering, Hanbat National University;

DOI : 10.5695/JKISE.2021.54.1.25


The fabrication of nanopore membrane by deposition of Al2O3 film using electron-beam evaporation, which is fast, cost-effective, and negligible dependency on substance material, is investigated for potential applications in water purification and sensors. The decreased nanopore diameter owing to increased wall thickness is observed when Al2O3 film is deposited on anodic aluminum oxide membrane at higher deposition rate, although the evaporation process is generally known to induce a directional film deposition leading to the negligible change of pore diameter and wall thickness. This behavior can be attributed to the collision of evaporated Al2O3 particles by the decreased mean free path at higher deposition rate condition, resulting in the accumulation of Al2O3 materials on both the surface and the edge of the wall. The reduction of nanopore diameter by Al2O3 film deposition can be applied to the nanopore membrane fabrication with sub-100 nm pore diameter.


Nanopore membrane;Anodic aluminum oxide(AAO);Thin-film deposition;Electron-beam evaporation;