Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (54권1호 18-24)

Manufacture and Surface Structure Characteristics of Mn-Doped (K, Na)NbO3 Films

Manufacture and Surface Structure Characteristics of Mn-Doped (K, Na)NbO3 Films

;;;
Kim, Yeon Jung;Byun, Jaeduk;Hyun, June Won;

College of Engineering, Dankook University;Department of Physics, Dankook University;
College of Engineering, Dankook University;Department of Physics, Dankook University;

DOI : 10.5695/JKISE.2021.54.1.18

Abstract

KNN is widely used in the electronic industry such as memory devices, sensors, and capacitors due to various structural, electrical, and eco-friendly properties. In this study, Mn-doped KNN was prepared by adopting a sol-gel method with advantages of low cost and large area thin film fabrication. The Mn-doped KNN thin films were deposited by annealing in air for 1 hour and 700℃. The surface morphology characteristics and grain size of the heat-treated KNN were observed by SEM and AFM, and we used the X-ray diffraction for measuring the crystal phase of KNN. The XRD analysis results show that the fabrication of (K0.5Na0.5)(Nb1-xMnn)O3 thin films by sol-gel method in the thin film process of this experiment was stable in the perovskite phase of c-axis orientation. The SEM and AFM results show that the cracks were not confirmed from the fracture surface data of KNN thin films and were densely deposited with thin films with uniform thickness.

Keywords

KNN;Manganese (Mn) ion;Sol-gel;Thin film;