한국표면공학회지 (52권5호 246-250)
High-temperature Corrosion of CrAlSiN Films in Ar/1%SO2 Gas
High-temperature Corrosion of CrAlSiN Films in Ar/1%SO2 Gas
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Lee, Dong Bok;Xiao, Xiao;Hahn, Junhee;Son, Sewon;Yuke, Shi;
School of Advanced Materials Science and Engineering, Sungkyunkwan University;Center for Materials and Energy Measurements, Korea Research Institute of Standards and Science;Department of Systems Management Engineering, Sungkyunkwan University;
School of Advanced Materials Science and Engineering, Sungkyunkwan University;Center for Materials and Energy Measurements, Korea Research Institute of Standards and Science;Department of Systems Management Engineering, Sungkyunkwan University;
Nano-multilayered
CrAlSiN thin film;Cathodic arc plasma deposition;