Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


한국표면공학회지 (52권3호 171-179)

Flow and Heat Transfer Analysis of Cooling Water in a Rotating Magnetron Cathode

회전형 마그네트론 음극의 냉각수 유동 및 열전달 해석

Joo, Junghoon;

군산대학교 공과대학 신소재공학과;
Department of Materials Science and Engineering Kunsan National University;

DOI : 10.5695/JKISE.2019.52.3.171


We have developed a numerical model to analyze flow dynamics and heat transfer characteristics of the cooling water in a circular rotating magnetron cathode by a moving boundary grid method realized in a commercial multiphysics package, CFD-ACE+. The numerical model is composed of a target, dual mass rotating cathode and cooling water connections. When the inlet and outlet of the cooling water are offset by the same distance from the rotation axis, the temperature at the center is higher by $50^{circ}C$ at maximum. At 5 mm away from the target surface, the temperature profile showed typical center high characteristic. At heat input of 30 kW, the maximum temperature change of the cooling water hits $6^{circ}C$ within 0.5 sec under 60 rpm. With a cooling water configuration of center in/edge out, the temperature of the center region of the target gets lowered. Within 100 seconds of plasma operation time, the cooling water temperature keeps getting higher.


heat transfer analysis;numerical modeling;rotating magnetron;CFD-ACE+;