Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


한국표면공학회지 (43권6호 304-308)

Study of Temperature Uniformity Improvement of Inductive Heating in MOCVD Systems to Deposit White LED

백색 LED 증착용 MOCVD 장치에서 유도가열을 이용한 기판의 온도 균일도 향상에 관한 연구

Hong, Kwang-Ki;Yang, Won-Kyun;Joo, Jung-Hoon;Lee, Seung-Ho;Lee, Tae-Wan;

군산대학교 공과대학 신소재공학과, 플라즈마 소재응용센터;주성 엔지니어링;
Department of Materials Science and Engineering, Plasma Materials Research Center, Kunsan National University;JUSUNG Engineering Co.;

DOI : 10.5695/JKISE.2010.43.6.304


Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.


Induction heating;Substrate temperature uniformity;Substrate rotating;CFD-ACE+;Numerical modeling;