Fabrication of Nano Metal Compounds Using Porous Aluminum Oxide Films
기공성 알루미나 산화 피막을 이용한 나노 금속화합물의 제조
Oh, Han-Jun;Jeong, Yong-Soo;Chi, Choong-Soo;
한서대학교 신소재공학과;한국재료연구소 융합공정연구본부;국민대학교 신소재공학부;
Department of Materials Science, Hanseo University;Materials Processing Division, Korea Institute of Materials Science;School of Advanced Materials Engineering, Kookmin University;
DOI : 10.5695/JKISE.2010.43.5.248
Porous $Al_2O_3$ film can be utilized as template for fabrication of nano-structured materials. Porous anodic alumina layer as template was prepared by anodization of aluminum in oxalic acid, and the pore diameter and barrier-type alumina layer can be controlled for proper anodizing parameter by widening process in $H_3PO_4$ solution. The $SiO_2$ nanodot and Ni nanowire was fabricated using anodic alumina template and their characteristics were investigated using SEM and TEM with EDS. Especially the growth mechanism of $SiO_2$ nanodot in alumina membrane compared with thinning of the alumina barrier layer during anodization was also investigated.