Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


한국표면공학회지 (39권3호 142-146)

Development of Plasma Confinement by Applying Multi-Polar Magnetic Fields in an Internal Inductively Coupled Plasma System

선형 유도결합 플라즈마 시스템에서 자장에 의한 플라즈마의 Confinement 효과에 관한 연구

Lim, Jong-Hyeuk;Kim, Kyong-Nam;Yeom, Geun-Young;

신소재공학과, 성균관대학교;
Department of Materials Science and Engineering, Sungkyunkwan University;


A novel internal-type linear inductive antenna, which we refer to as a double comb-type antenna, was developed for a large-area plasma source with substrate size of $880;mm{ imes}660;mm$ ($4^{th}$ generation glass size). In this study, effect of plasma confinement by applying multi-polar magnetic field was investigated. High density plasmas of the order of $3.18{ imes}10^{11};cm^{-3}$ could be obtained with a pressure of 15 mTorr Ar at an inductive power of 5000 W with good plasma stability. This plasma density is higher than that obtained for the conventional double comb-type antenna, possibly due to the plasma confinement, low rf voltage, resulting in high power transfer efficiency. Also, due to the remarkable reduction in the antenna rf voltage and length, a plasma uniformity of less than 3% could be obtained within a substrate area of $880;mm{ imes}660;mm$ as rf power increased.


Plasma;Large area;Impedance;Display;