Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


한국표면공학회지 (39권2호 64-69)

Nanolithography Using Haptic Interface in a Nanoscale Virtual Surface

햅틱인터페이스를 이용한 나노스케일 가상표면에서의 나노리소그래피

Kim Sung-Gaun;

공주대학교 기계자동차공학부;
Div. of Mechanical and Automotive Engineering, Kongju National University;


Nanoscale task such as nanolithography and nanoindenting is a challenging work that is beyond the capabilities of human sensing and precision. Since surface forces and intermolecular forces dominate over gravitational and other more intuitive forces of the macro world at the nanoscale, a user is not familiar with these novel nanoforce effects. In order to overcome this scaling barrier, haptic interfaces that consist of visual and force feedback at the macro world have been used with an Atomic Force Microscope (AFM) as a manipulator at the nanoscale. In this paper, a nanoscale virtual coupling (NSVC) concept is introduced and the relationship between performance and impedance scaling factors of velocity (or position) and force are explicitly represented. Experiments have been performed for nanoindenting and nanolithography with different materials in the nanoscale virtual surface. The interaction forces (non contact and contact nanoforces) between the AFM tip and the nano sample are transmitted to the operator through the haptic interface.


Haptic interfaces;Nonorobotics;Nonolithogrophy;Teleoperation control; Nonotechnology;